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UP193HE Homogenized Excimer New Wave Research introduces its 2nd generation excimer laser ablation system with full beam homogenization. Craters in quartz having <10nm flatness have been demonstrated making the UP193HE (Homogenized Excimer) the preferred choice for diamonds, inclusions and other highly transparent materials.
Features
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| Laser output | 193nm flat-beam | |
| Energy density | To 35 J/cm2 | |
| Pulse Rate | 1-50 Hz (water cooling required above 20Hz) | |
| Energy Stability | 2% - closed loop controlled | |
| Energy Stabilization Module |
Energy Stabilization Module Built-in energy monitor with closed loop control of the energy; includes display. Monitor is calibrated only once during system installation, then annually. |
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| Homogenization | Dual homogenizer micro-lens arrays coupled to internally homogenized Existar excimer laser. |
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| Spot size | 4 -272µm | |
| Spot selections | 12 pre-calibrated, software selectable spot sizes | |
| Pre-ionization | Corona Preionization resulting in higher pulse-to-pulse stability & a highly homogenous beam profile |
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| Software Control | Manual control and software control via Merchantek, Ver.1.5 software operates on Windows 98, 2000, NT & XP with • Bi-directional control between MS and UP193HE. • Includes 50mm FOV sample mosaic navigation, 3D contour following and other functions. (See software function list) |
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| Optical magnification | Motorized variable zoom with 5.6 to 36X optical magnification | |
| Camera | Color CCD and frame grabber-operates from mass spectrometer's computer. |
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| Lighting | Reflected, transmitted & ring | |
| Polarizers | Rotating cross-polarizers, standard feature | |
| Solenoids | Automated solenoids - purge, bypass and on-line. | |
| Microscope | (Optional) Nikon microscope head with 15X eyepieces | |
| Auto-focus | (Optional) diode laser-based auto-focus. | |
| Sample chamber | Cassette style, sample chamber measures 60 mm ID X 50 mm inside height for thin sections, thick sections and standards. User can view sample directly. |
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| Stages | Sub-micron resolution of X, Y and Z axes; 52mm travel on X & Y | |
| Mobile | Mobile cart with wheels and vibration-dampening foot-locks. | |
| Gas Consumption per Gas Exchange |
Beam path | |
| Static gas life | 10 days between refills | |
| Dynamic gas life | 4 million pulses between refills | |
| Beam path | Sealed for nitrogen purging. |
Sample Handling Enclosure Options
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