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Wave Research Enhances Throughput of AccuScribe Improved Throughput Provides 30% Decrease in Scribe Cost of Ownership Over Previous System Fremont, Calif., March 20, 2003 – New Wave Research introduces the AccuScribe-SS40—the next generation of its successful laser-based sapphire wafer scribing systems. With the release of the first AccuScribe-SS20 system in June 2002, LED-scribing costs were reduced by over 50% compared to traditional diamond scribe techniques. The new AccuScribe-SS40 features throughput of over 3 wafers per hour—further reducing scribe costs by nearly 30%. “Our AccuScribe laser-based technology now represents over 85% of the market share,” said May Su, New Wave Research vice president of marketing. “It’s a field-proven, cost-effective alternative to diamond scribing technology. Consistently clean, die singulation scribe lines at uniform depth have resulted in superior die singulation yield for LED manufacturers. Now with our throughput enhancement in the SS40, we’ve jumped to the next level in significantly reducing scribe costs.” The reduction in scribe cost over traditional diamond scribing technologies can be attributed to a number of factors. Primarily, while the hardness of sapphire causes diamond scribe tips to quickly degrade and demand constant maintenance, AccuScribe units require very little maintenance time and virtually no consumable parts. In addition, the accuracy and repeatability inherent in laser processing produces a consistently higher yield while reducing operating cost. The AccuScribe-SS40 processes 350- x 350-µm dies on 50-mm wafers at a rate of over three wafers per hour. Channel depth is 25 µm and channel width is = 8 µm, easily falling within a 30-µm street. In addition, the system features outstanding repeatability—over a run of 500 wafers, it maintains a scribe depth and width of ±10%. To bring performance to AccuScribe-SS40 level, early AccuScribe adopters can easily field-retrofit AccuScribe-SS20 units with minimal hardware, software and firmware changes. Ideal for the 24-hour, seven-day-per-week production environment, the AccuScribe-SS40 features a stable and robust design that allows for easy loading, unloading and alignment of wafers. It accommodates industry-standard blue film expansion frames, performs both full and partial wafer scribing and features an automatic edge detection capability. A positive pressure debris control system minimizes contamination on the wafer surface. A vacuum chuck maintains wafer flatness and ensures consistent laser focus and scribe depth during the operation. To further simplify the scribing process, New Wave Research also provides a user-friendly software package that controls all laser parameters, alignment, stage positioning, and displays real time images of the scribing process. Established in 1990, New
Wave Research creates, develops, and manufactures high-quality, laser-based
systems and modules for microelectronics and analytical instrumentation
applications. For more information, contact May Su, New Wave Research,
47613 Warm Springs Blvd., Fremont, Calif., 94539; 510/249-1550, 510/249-1551
(fax); e-mail: NWR_lasers@esi.com; Web: www.new-wave.com Contact: Tracy Getz
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